Press Release for Aerotech

LINEAR MOTION STAGE WITH NANOMETER ACCURACY AND LONG TRAVEL
New ANT95-L from Aerotech provides compact solution
for nanopositioning research and manufacturing applications

Chinese
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A linear motor stage providing nanometer-level performance in a large travel format has been introduced by Aerotech. The new ANT95-L crossed-roller-bearing stage uses advanced direct-drive technology to achieve resolution of 1 nm, repeatability of ±50 nm, and accuracy of ±250 nm. It is offered in 25 mm, 50 mm, 75 mm and 100 mm travel models.

Processes that can benefit from the new stage include direct-writing, laser micromachining, inspection, wafer scribing, spectroscopy and optical delay lines. It has research and manufacturing applications in laser processing, photonics, medical devices, semiconductors and data storage.

The combination of nanometer accuracy and long travel allows the compact ANT95-L to solve many applications that have traditionally required complex integration of multiple technologies and components from different vendors. It offers longer travel and higher payload capability than piezo stages.

The stage’s frictionless direct-drive technology is non-cogging and non-contact, assuring zero backlash and hysteresis. Anti-creep crossed-roller bearings allow ultra-precision (1 nm) incremental moves to be accomplished repeatably and reliably, with <1 nm in-position stability. Direct-drive and crossed-roller bearings assure virtually maintenance-free operation in processes that require smooth and precise motion.

ANT95-L stages are available in X, XY, XYZ and many other combinations for single- or multi-axis positioning. Universal base mounting patterns allow use in a wide range of configurations.

Aerotech is a leading supplier of motion control products to industry, government, science and research institutions around the world. Its precision products provide critical performance for demanding applications requiring high precision, high-throughput motion control solutions.

Photo Captions:
Click on image to download high resolution file.
A. New ANT95-L crossed-roller-bearing stage from Aerotech uses advanced direct-drive technology to achieve high resolution, repeatability and accuracy with 25, 50, 75 and 100 mm travel.
B. Long travel, precise nanometer incremental step size, excellent stability and repeatability make the ANT95-L ideal for high-precision laser physics and optical applications like this ultrafast 2D-IR spectroscopy experiment.

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Product Sales Contacts:

CHINA
AEROTECH CHINA
Phone: +852 3793 3488
saleschina@aerotech.com